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トップページ » 貿易事業 » ファインケミカル » 有機中間体化合物 » 化学気相蒸着(CVD)・ 原子層堆積(ALD)用素材

化学気相蒸着(CVD)・ 原子層堆積(ALD)用素材

その他の化合物を探す

元素 CAS番号 化合物名 分子式
Al 14319-08-5 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)aluminium, 99 % Al(TMHD)3
352546-72-6 Tris(diethylamino)alumunium(III),98% Al(Et2N)3
Sb 603-36-1 Triphenylantimony(III) 99% Ph3Sb
7289-92-1 Tris(dimethylamido)antimony(III) , 98% (Me2N)3Sb
10433-06-4 Antimonium(III)ethoxide, 99% Sb(EtO)3
Ba 17594-47-7 Barium bis(2,2,6,6-tetramethyl-3,
5-heptanedionate) hydrate, 98%
Ba(TMHD)2*xH2O

Bis(tri-i-propylcyclopentadienyl)Ba*2THF, 95% [(i-Pr)3Cp]2Ba*2THF
210758-43-3 Bis(n-propyltetramethylcyclopentadienyl)
Ba, 98%
(PrMe4Cp)2Ba
112379-49-4 Bis(pentamethylcyclopentadienylBa* 2THF,99% Cp*2Ba*2THF

Bis(tri-tert-bytylcyclopentadienyl)Ba*THF, 95% [(t-Bu)3Cp]2Ba*THF
Bi 142617-53-6 2,2,6,6Tetramethyl-3,5-heptanedionate(III)Bi,98% Bi(TMHD)3
7239-60-3 Bis(acetato-O)triphenylbismuth, 98% Ph3Bi(Oас)2
603-33-8 Triphenylbismuthine,99% Ph3Bi
83724-41-8 Tris(2-methoxyphenyl)bismuthine, 95% (CH3OC6H4)3Bi
B 1109-15-5 Tris(pentafluorophenyl)borane,95% (C6F5)3B
Ca 36818-89-0 Calcium bis(2,2,6,6-tetramethyl-3,
5-heptanedionate), 98%
Ca(TMHD)2
Cerium 122528-16-9 Tris(isopropylcyclopentadienyl)Ce,99.9% i-PrCp3Ce
251984-08-4 Tris(tetramethylcyclopentadienyl)Ce,99.9% Me4CpH)3Ce
18960-54-8 2,2,6,6Tetramethyl-3,5-heptanedionate(IV)Ce,99,5% 99,99 (TMHD)4Ce
41836-21-9 Tris(bis(trimethylsilyl)amino)cerium,96% ((Me3Si)2N)3Ce
Cr 1271-24-5 Bis(cyclopentadienyl)chromium 95% Cp2Cr
74507-61-2 Bis(pentamethylcyclopentadienyl)
chromium,96%
Cp*2Cr
14434-47-0 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)chromium(III),99% Cr(TMHD)3
1271-54-1 Bis(benzene)chromium, 97 % (PhH)2Cr
55940-03-9 Bis(ethylcyclopentadienyl)chromium Cp2Cr
12212-68-9 Bis(ethylbenzene)chromium (mixture of ((C2H5)xC6H(6-x))2Cr, x=0-4 (PhEt)2Cr
Co 1277-43-6 Bis(cyclopentadienyl)cobalt Cp2Co
55940-05-1 Bis(ethylcyclopentadienyl)cobalt Co(EtCp)2
74507-62-3 Bis(pentamethylcyclopentadienyl)cobalt Cp*2Co
12078-25-0 Dicarbonylcyclopentadienylcobalt, 99%+ CpCo(CO)2
56792-69-9 Dicobalt hexacarbonyl t-butylacetylene, 99%
Cu 185827-91-2 Bis(dimethylamino-2-propoxy)
copper(II), min. 98%

14040-05-2 Bis(2,2,6,6-tetramethyl-3,5-heptanedionate)
copper,99,9%
Cu(TMHD)2
695188-31-9 Bis(N,N'-di-sec-butylacetamidinato)
dicopper (I), 99%  

Dy
Tris(isopropylcyclopentadienyl)
dysprosium(III) 99.9% metals basis
(i-PrCp)3Dy
Er 153608-51-6 Tris(butylcyclopentadienyl)
erbium, 99.9% metals basis
(n-BuCp)3Er
35733-23-4 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)erbium(III),99,5% 99,99 (TMHD)3Eb
130521-76-5 Tris(isopropylcyclopentadienyl)erbium,
99.9% metals basis
(i-PrCp)3Er
103457-72-3 Tris(N,N-bis(trimethylsilyl)amide erbium, 98% Er((Me3Si)2N)3
Eu 15522-71-1 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)
europium(III) 99,5%99,99
(TMHD)3Eu
35789-02-7 Tris(bis(trimethylsilyl)amide europium, 98% Eu((Me3Si)2N)3
308847-87-2 Tris(tetramethylcyclopentadienyl)
europium, 98%
(CpMe4)3Eu
Fe 1271-86-9 Dimethylaminomethyl)ferrocene,min95% Cp2FeCH2NMe2
620945-29-1 Iron (III) tert-butoxide, 99,9% Fe Fe(t-BuO)3
Gd 35789-03-8 Tris(N,N-bis(trimethylsilyl)amine)gadolinium [(Me3Si)2N]3Gd
1272-21-5 Tris(cyclopentadienyl)gadolinium, 99.9% (PrCp)3Gd
307531-69-7 Tris(ethylcyclopentadienyl)gadolinium, 99.9% Gd(EtCp)3

Tris(isopropylcyclopentadienyl)
gadolinium, 99.9%
(i-PrCp)3Gd
14768-15-1 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)gadolinium(III),99% 99,9 (TMHD)3Gd
308847-85-0 Tris(tetramethylcyclopentadienyl)
gadolinium, 99.9%
(Me4Cp)3Gd
Ga 57731-40-5 Tris(dimethylamido)gallium(III) 98%( 99,9%Ga) (Me2N)3Ga
Ge 14165-55-0 Germanium ethoxide 99,95% Ge(OEt)4
21154-48-3 Germanium(IV)isopropoxide, 97% Ge(i-Opr)4
993-52-2 Hexamethyldigermanium,97% (Me3Ge)2
993-62-4 Hexaethyldigermanium,97% (Et3Ge)2
2816-39-9 Hexaphenyldigermanium,97% (Ph3Ge)2
865-52-1 Tetramethylgermanium,98% Me4Ge
1188-14-3 Triethylgermanium hydride,98% Et3GeH
2816-43-5 Triphenylgermanium hydride, Ph3GeH
Hf 68193-45-3 Dimethylbis(t-butylcyclopentadienyl)
hafnium min 95%
[(C4H9)C5H4]2Hf(CH3)2
37260-88-1 Dimethylbis(cyclopentadienyl)
hafnium min 98%
(C5H5)2Hf(CH3)2
2172-02-3 Hafnium (IV) t-butoxide Hf(Obu)4
13428-80-3 Hafnium (IV) etoxide 99% Hf(OEt)4
70969-29-8 Bis(trimethylsilyl)amidohafnium(IV)
chloride ≥95%, ≥99.99% trace metals basis
[[(CH3)3Si]2N]2HfCl2
17475-67-1 Hafnium 2,4-pentanedionate 97% Hf(acac)4
2171-99-5 Hafnium (IV) i-propoxide
monoisopropilate 99%
Hf(i-OPr)4*i-PrOH
19824-55-6 Tetrakis(diethylamino)hafnium (Et2N)4Hf
19962-11-9 Tetrakis(dimethylamino)hafnium (Me2N)4Hf
63370-90-1 Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)hafnium(IV),95% (99,9%) Hf(TMHD)4
Ho 1272-22-6 Tris(cyclopentadienyl) holmium Cp3Ho
41836-27-5 Tris[N,N-bis(trimethylsilyl)amide]
holmium(III) 97%
Ho(N(Si(CH3)3)2)3
15522-73-3 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)holmium(III) Ho(TMHD)3
La 90397-54-9 Lantanum(III)etoxide,95% La(OEt)3
19446-52-7 Lantanum(III)isopropoxide,40%La(Assay) La(i-Opr)3
175923-07-6 Tris(bis(trimethylsilyl)amide lantanum, 98% La((Me3Si)2N)3
68959-87-5 Tris(isopropylcyclopentadienyl)
lantanum 99,9%
(i-PrCp)3La
1272-23-7 Tris(cyclopentadienyl)lanthanum,99,9% (C5H5)3La
148607-23-2 Tris(tetramethylcyclopentadienyl)
lanthanum 99,9
(Me4Cp)3La
Mg 1284-72-6 Bis(cyclopentadienyl)magnesium,
min 97% (99,9% Mg)
Cp2Mg
114460-02-5 Bis(ethylcyclopentadienyl)magnesium,98%+ (EtCp)2Mg
114504-74-4 Bis(i-propylcyclopentadienyl)magnesium, (i-PrCp)2Mg
74507-64-5 Bis(pentamethylcyclopentadienyl)magnesium Cp*2Mg
Mn 1271-27-8 Bis(cyclopentadienyl)manganese,98+% Cp2Mn
101923-26-6 Bis(ethylcyclopentadienyl)manganese,min 98% (EtCp)2Mn
67506-86-9 Bis(pentamethylcyclopentadienyl)manganese Cp*2Mn
14324-99-3 Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)manganese(III),99% Mn(TMHD)2
Mo 12176-06-6 Cyclopentadienylmolybdenum
tricarbonyl hydride
CpMo(CO)3H

Bis(tret-butylimido)Bis(dimethylamido)
molybdenum(VI)

32877-00-2 Bis(ethylbenzene)molybdenum, mixture of isomers (EtPh)2Mo

Bis(cyclopentadienyl)molybdenum dihydride Cp2MoH2
Nb 19824-58-9 Pentakis(dimethylamino)niobium Nb[N(CH3)2]5
210363-27-2 Tris(diethylamido)(tert-butylimido)niobium(V
Nd 19236-15-8 Neodymium(III) isopropoxide,99,8% Nd(i-PrO)3
15492-47-4 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)neodymium(III),99,5% Nd(TMHD)3
148274-47-9 Tris[N,N-Bis(trimethylsilyl)amide]neodymium (III), 97% [(Me3Si)2N]3Nd
1273-98-9 Tris(cyclopentadienyl)neodymium, 99% (99.9%-Nd) (REO) Cp3Nd
69021-85-8 Tris(isopropylcyclopentadienyl)Nd 99,9% (i-PrCp)3Nd
Ni 12107-46-9 Allylcyclopentadienylnickel,97% AllCpNi
31886-51-8 Bis(ethylcyclopentadienyl)nickel,97% (EtCp)2Ni
57197-55-4 Bis(i-propylcyclopentadienyl)nickel,97% (i-PrCp)2Ni
1293-95-4 Bis(methylcyclopentadienyl)nickel,97% (MeCp)2Ni
41749-92-2 Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)nickel (II),98%99,9 Ni(TMHD)2
Pb 21319-43-7 2,2,6,6Tetramethyl-3,5-heptanedionate (II)
Pb,99%
Pb(TMHD)4
Pr 15492-48-5 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)praseodymium (III), 99% (99.9%-Pr) Pr(TMHD)3
35789-00-5 TRIS[N,N-BIS(TRIMETHYLSILYL)
AMIDE]PRASEODYMIUM(III),
Pr[N(Si(CH3)3)2]3
69021-86-9 Tris(isopropylcyclopentadienyl)
praseodymium 99,9%
(i-PrCp)3Pr
Sm 15492-50-9 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)samarium(III),99,5% (TMHD)3Sm

Tris(N,N-bis(trimethylsilyl)amide)samarium(III),min 98% (Me3Si)2N)3Sm
1298-55-1 Tris(cyclopentadienyl)samarium 99,9% (Cp)3Sm
148607-24-3 Tris(N,N-bis(trimethylsilyl)amide)
samarium(III),min 98%
[(Me3Si)2N]3Sm
3504-40-3 Samarium(III) isopropoxide,99,9% Sm(i-Pr)3
Se 645-96-5 Benzeneselenol,97% PhSeH
593-79-3 Dimethylselenide,98% Me2Se
627-53-2 Diethylselenide,98% Me2Se
33861-17-5 Trimethyl(phenylseleno)silane Me3SiSePh
Si 1112-66-9 Tetraallylsilane,min 97% All4Si
1112-55-6 Tetravinylsilane,97% Vin4Si
1777-03-3 (Triethylsilyl)acetylene, 97%
15112-89-7 Tris(dimethylamino)silane,99+% (Me2N)3SiH
Tin 993-50-0 (Dimethylamino)trimethyltin tech. Me3SnNMe2
661-69-8 Hexamethylditin,99% Me3SnSnMe3
56508-29-3 Tin(||) acetylacetonate, 99% Sn(AcAc)
81353-38-0 Tributyl(trimethylsilylethynyl)tin,min96% GC
1199-95-7 Trimethyl(phenylethynyl)tin,97% Me3SnC|||CPh
2117-50-2 Bis(trimethylstannyl)acetylene (Me3Sn)2C|||C
59863-13-7 Bis[bis(trimethylsilyl)amino]tin(II) [(Me3Si)2N]2Sn
994-71-8 Bis(tributylstannyl)acetylene,97% (Bu3Sn)2C|||C
6452-61-5 Dibutyldiphenyltin 97% Bu2SnPh2
15336-98-8 Diallyldibuthyltin, 98% All2SnBu2
1064-10-4 Hexaphenylditin(IV) 97% Ph6Sn2
1067-55-6 Dibutyltindimetoxide Bu2Sn(OCH3)2
1080-43-9 Dimethyldiphenyltin 99% Me2SnPh2
813-19-4 Hexabuthylditin, min 95% Bu6Sn2
661-69-8 Hexamethylditin,99% Me3SnSnMe3
7393-43-3 Tetraallylltin min 95% All4Sn
597-64-8 Tetraethyltin 98% Et4Sn
1066-77-9 Tetrakis(dimethylamino)tin 99% Sn(Et2N)4
594-27-4 Tetramethyltin,99% Me4Sn
2949-42-0 Tetra-i-propyltin,min.97% (i-Pr)4Sn
1112-56-7 Tetravinyltin, 97% Vin4Sn
14791-99-2 Tin(II) etoxide min 99% Sn(OEt)2
151861-56-2 Tin(IV) t-butoxide 99,99% Sn(t-OBu)4
994-89-8 Tributylethynyltin, min. 95 %
688-73-3 Tributyltin hydride,97% Bu3SnH
81353-38-0 Tributyl(trimethylsilylethynyl)tin,min96% GC
6056-50-4 Tricyclohexyltin hydride 97% (C6H11)3SnH
1199-95-7 Trimethyl(phenylethynyl)tin,97% Me3SnC|||CPh
892-20-6 Triphenyltinhydride Ph3SnH
Sr 199445-30-2 Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)
strontium(II)
Sr(TMHD)2

Bis(tri-i-propylcyclopentadienyl)
strontium*THF
[(i-Pr)3Cp]2Sr*THF
112379-48-3 Bis(pentamethylcyclopentadienyl)
strontium*DME
Cp*2Sr*DME

Bis(i-propyltetramethylcyclopentadienyl)
strontium* DME,
(i-PrMe4Cp)2Sr*DME

Bis(n-propyltetramethylcyclopentadienyl)
strontium* DME,
(PrMe4Cp)2Sr*DME

Bis(tris(tert-butylcyclopentadienyl)strontium [(t-BuCp)3]2Sr
Ta 19824-59-0 Pentakis(dimethylamino)tantalum,99,9% Sublim. Ta(Me2N)5
51094-78-1 Tantalum(V)butoxide 98% Ta(Obu)5
6074-84-6 Tantalum(V)etoxide 99,99% Ta(Oet)5
20219-33-4 Tetraetoxytantalum acetylacetonate 99,99% crystall (EtO)4TaAcAc
169896-41-7 Tris(diethylamino)t-Butyliminotantalum 99,99% t-BuNTa(Et2N)3
33329-35-0 Tris(dimethylamino)3-Hexynetantalum

Tetraetoxytantalum tetramethylheptanedionate (EtO)4TaTMHD
67313-80-8 Tris(diethylamino)(ethylimino)tantalum(V)
99.99% trace metals basis
C2H5NTa(N(C2H5)2)3
511292-99-2 Tris(ethylmethylamino)(tert-butylimino)tantalum(V) electronic grade,
≥95% (CP), ≥99.99% trace metals basis
C13H33N4Ta
Tb 15492-51-0 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)
terbium(III),99,5%
(TMHD)3Tb
312696-25-6 Tris(isopropylcyclopentadienyl)terbium,99.9% (i-PrCp)3Tb 99,9%Tb
1272-25-9 Tris(cyclopentadienyl)terbium(III) 99.9% trace metals basis Cp3Tb
148607-25-4 Tris(tetramethylcyclopentadienyl)terbium(III) 99.9% (Me4Cp)3Tb
Ti 79376-38-8 Dimethylbis(t-butylcyclopentadienyl)titanium (IV), min. 98%
79269-71-9 Bis(tert-butylcyclopentadienyl)titanium(IV) dichloride 97% C18H26Cl2Ti
123927-75-3 Pentamethylcyclopentadineyl titanium trimethoxide, min 97%
123798-13-0 Bis(diethylamido)bis(dimethylamido)
titanium(IV) electronic grade,
≥95%, ≥99.99% trace metals basis
Ti(N(CH3)2)2(N(CH2CH3)2)2
4419-47-0 Tetrakis(diethylamino)titan,99% Ti(Et2N)4
3275-24-9 Tetrakis(dimethylamino)titan 99% (Me2N)4Ti
308103-54-0 Tetrakis(ethylmethylamido)titanium(IV) electronic grade, ≥99.99% [(CH3C2H5)N]4Ti
144665-26-9 Titanium(IV) diisopropoxidebis(2,2,6,6-tetramethyl-3,5-heptanedionate) 99.99% Ti[OCC(CH3)3CHCOC(CH3)3]2
(OC3H7)2
546-68-9 Titanium(IV) isopropoxide,97% 99,999% metal Ti(i-PrO)4
3087-39-6 Titanium(IV) t-butoxide 99% Ti(t-OBu)4
Tm 15631-58-0 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)thulium(III) Tm(TMHD)3
1272-26-0 Tris(cyclopentadienyl)thulium(III), 99,9%Tm Cp3Tm
W 72207-45-5 Bis(tret-butylimido)Bis(tret-butylamido)
tungsten

1271-33-6 Bis(cyclopentadienyl)tungsten dihydride, 97% Cp2WH2
308847-90-7 Bis(ethylcyclopentadienyl)tungsten dihydride,95% (EtCp)WH2
64561-25-7 Bis(isopropylcyclopentadienyl)
tungsten dihydride,97%
(i-PrCp)2WH2
406462-43-9 Bis(tert-butylimino)bis(dimethylamino)tungsten(VI)
97%, 99.99% trace metals basis
((CH3)3CN)2W(N(CH3)2)2
406462-43-9 Bis(tert-butylimino)bis(dimethylamino)tungsten(VI)
packaged for use in deposition systems
((CH3)3CN)2W(N(CH3)2)2
12184-26-8 Bis(cyclopentadienyl)tungsten (IV)
dichloride 97%
Cp2WCl2
12128-26-6 Cyclopentadienyltungsten (II)
tricarbonyl hydride 98%
CpW(CO)3H

Ehylcyclopentadienyltungsten
tricarbonyl methyl
CpW(CO)3
12129-70-3 Tetracarbonyl(1,5-cyclooctadiene)tungsten(0) C12H12O4W
58204-42-5 Triamminetungsten(IV) tricarbonyl (NH3)3W(CO)3
V
Bis(benzene)vanadium (PhH)2V 95%
36955-48-3 Bis(ethtylbenzene)vanadium (EtPh)2V 98%
55940-04-0 Bis(ethylcyclopentadienyl)vanadium(II) (EtCp)2V
1277-47-0 Bis(cyclopentadienyl)vanadium Cp2V
13476-99-8 Vanadium(III) acetylacetonate 98% (AcAc)3V
5588-84-1 Vanadium(Y)oxytriisopropoxide 98%+ (i-PrO)3VO
1686-22-2 Vanadium(V)oxytriethoxide,95%
1686-23-3 Vanadium(5)oxytripropoxide, 98% VO(OPr)3
Y 312739-77-8 Tris(butylcyclopentadienyl)yttrium, 99.9% BuCp)3Y
41836-28-6 Tris(N,N-bis(trimethylsilyl)amide)yttrium(III) (Me3Si)2N)3Y

Tris(i-propylcyclopentadienyl)yttrium,99.9 i-PrCp)3Y

Tris(ethylcyclopentadienyl)yttrium, 99.9% MeCp)3Y
329735-72-0 Tris(methylcyclopentadienyl)yttrium, 99.9% MeCp)3Y
2172-12*5 Yttrium isopropoxide Y(OCH(CH3)2)3
15632-39-0 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) (TMHD)3Y
Yb 1295-20-1 Tris(cyclopentadienyl)ytterbium(III) 99.9%
trace metals basis
Cp3Yb
15492-52-1 Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III)99,5% (TMHD)3Yb

Tris(isopropylcyclopentadienyl)Ytterbium,
99.9% metals basis
(i-PrCp)3Yb min 97% 99,9%metall

Tris(methylcyclopentadienyl)Ytterbium
99.9% metals basis
Cp3Yb
6742-69-4 Ytterbium(III) isopropoxide,99,9% Yb(i-Opr)3
Zn 1799-90-2 BIS(PENTAFLUOROPHENYL)ZINC, 97% (C6F5)2Zn
1078-58-6 Diphenylzinc,92% Ph2Zn
14363-14-5 Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)
zinc(II) 97%
Zn(OCC(CH3)3CHCOC
(CH3)3)2
Zr 37342-98-6 Bis(cyclopentadienyl)zirconium(IV)
dihydride 95%
Cp2ZrH2

Bis(methyl-η5−cyclopentadienyl)
methoxymethylzirconium

67108-80-9 Dimethylbis(pentamethylcyclopentadienyl)
zirconium
C22H36Zr
13801-49-5 Tetrakis(diethylamino)zirconium, 99% Zr(NEt2)4
19756-04-8 Tetrakis(dimethylamino)zirconium, 98% Zr(NMe2)4
175923-04-3 Tetrakis(ethylmethylamino)zirconium Zr(NEtMe)4
204522-78-1 Zirconium(IV) diisopropoxidebis(2,2,6,6-tetramethyl-3,5-heptanedionate) ≥99.99% Zr(OCC(CH3)3CHCOC
(CH3)3)2(OC3H7)2
18865-74-2 Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium(IV),99% Zr(TMHD)4
70969-28-7 Zirconium bis(hexamethyldisilazide) dichloride
2081-12-1 Zirconium(4)t-butoxide (99,99% Zr ) (t-BuO)4Zr
2171-98-4 Zirconium(4)i-propoxide (isopropanol adduct) (i-PrO)4Zr
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